Study on optimizing ultrasonic irradiation period for thick polycrystalline PZT film by hydrothermal method (bibtex)
by Kanako Ohta, Gaku Isobe, Peter Bornmann, Tobias Hemsel, Takeshi Morita
Abstract:
The hydrothermal method utilizes a solution-based chemical reaction to synthesize piezoelectric thin films and powders. This method has a number of advantages, such as low-temperature synthesis, and high purity and high quality of the product. In order to promote hydrothermal reactions, we developed an ultrasonic assisted hydrothermal method and confirmed that it produces dense and thick lead--zirconate--titanate (PZT) films. In the hydrothermal method, a crystal growth process follows the nucleation process. In this study, we verified that ultrasonic irradiation is effective for the nucleation process, and there is an optimum irradiation period to obtain thicker PZT films. With this optimization, a 9.2-$\mu$ m-thick PZT polycrystalline film was obtained in a single deposition process. For this film, ultrasonic irradiation was carried out from the beginning of the reaction for 18 h, followed by a 6 h deposition without ultrasonic irradiation. These results indicate that the ultrasonic irradiation mainly promotes the nucleation process.
Reference:
Ohta, K.; Isobe, G.; Bornmann, P.; Hemsel, T.; Morita, T.: Study on optimizing ultrasonic irradiation period for thick polycrystalline PZT film by hydrothermal method. Ultrasonics, volume 53, 2013.
Bibtex Entry:
@ARTICLE{Ohta2013,
  author = {Kanako Ohta and Gaku Isobe and Peter Bornmann and Tobias Hemsel and
	Takeshi Morita},
  title = {Study on optimizing ultrasonic irradiation period for thick polycrystalline
	PZT film by hydrothermal method},
  journal = {Ultrasonics},
  year = {2013},
  volume = {53},
  pages = {837 - 841},
  number = {4},
  abstract = {The hydrothermal method utilizes a solution-based chemical reaction
	to synthesize piezoelectric thin films and powders. This method has
	a number of advantages, such as low-temperature synthesis, and high
	purity and high quality of the product. In order to promote hydrothermal
	reactions, we developed an ultrasonic assisted hydrothermal method
	and confirmed that it produces dense and thick lead--zirconate--titanate
	(PZT) films. In the hydrothermal method, a crystal growth process
	follows the nucleation process. In this study, we verified that ultrasonic
	irradiation is effective for the nucleation process, and there is
	an optimum irradiation period to obtain thicker PZT films. With this
	optimization, a 9.2-$\mu$ m-thick PZT polycrystalline film was obtained
	in a single deposition process. For this film, ultrasonic irradiation
	was carried out from the beginning of the reaction for 18 h, followed
	by a 6 h deposition without ultrasonic irradiation. These results
	indicate that the ultrasonic irradiation mainly promotes the nucleation
	process.},
  bdsk-url-1 = {http://www.sciencedirect.com/science/article/pii/S0041624X12002648},
  bdsk-url-2 = {http://dx.doi.org/10.1016/j.ultras.2012.12.003},
  doi = {http://dx.doi.org/10.1016/j.ultras.2012.12.003},
  file = {Ohta2013.pdf:Ohta2013.pdf:PDF},
  issn = {0041-624X},
  keywords = {Piezoelectric material},
  owner = {K. Agbons jr},
  timestamp = {2013.09.26},
  url = {http://www.sciencedirect.com/science/article/pii/S0041624X12002648}
}