by Kanako Ohta, Gaku Isobe, Peter Bornmann, Tobias Hemsel, Takeshi Morita
Abstract:
The hydrothermal method utilizes a solution-based chemical reaction to synthesize piezoelectric thin films and powders. This method has a number of advantages, such as low-temperature synthesis, and high purity and high quality of the product. In order to promote hydrothermal reactions, we developed an ultrasonic assisted hydrothermal method and confirmed that it produces dense and thick lead--zirconate--titanate (PZT) films. In the hydrothermal method, a crystal growth process follows the nucleation process. In this study, we verified that ultrasonic irradiation is effective for the nucleation process, and there is an optimum irradiation period to obtain thicker PZT films. With this optimization, a 9.2-$\mu$ m-thick PZT polycrystalline film was obtained in a single deposition process. For this film, ultrasonic irradiation was carried out from the beginning of the reaction for 18 h, followed by a 6 h deposition without ultrasonic irradiation. These results indicate that the ultrasonic irradiation mainly promotes the nucleation process.
Reference:
Ohta, K.; Isobe, G.; Bornmann, P.; Hemsel, T.; Morita, T.: Study on optimizing ultrasonic irradiation period for thick polycrystalline PZT film by hydrothermal method. Ultrasonics, volume 53, 2013.
Bibtex Entry:
@ARTICLE{Ohta2013,
author = {Kanako Ohta and Gaku Isobe and Peter Bornmann and Tobias Hemsel and
Takeshi Morita},
title = {Study on optimizing ultrasonic irradiation period for thick polycrystalline
PZT film by hydrothermal method},
journal = {Ultrasonics},
year = {2013},
volume = {53},
pages = {837 - 841},
number = {4},
abstract = {The hydrothermal method utilizes a solution-based chemical reaction
to synthesize piezoelectric thin films and powders. This method has
a number of advantages, such as low-temperature synthesis, and high
purity and high quality of the product. In order to promote hydrothermal
reactions, we developed an ultrasonic assisted hydrothermal method
and confirmed that it produces dense and thick lead--zirconate--titanate
(PZT) films. In the hydrothermal method, a crystal growth process
follows the nucleation process. In this study, we verified that ultrasonic
irradiation is effective for the nucleation process, and there is
an optimum irradiation period to obtain thicker PZT films. With this
optimization, a 9.2-$\mu$ m-thick PZT polycrystalline film was obtained
in a single deposition process. For this film, ultrasonic irradiation
was carried out from the beginning of the reaction for 18 h, followed
by a 6 h deposition without ultrasonic irradiation. These results
indicate that the ultrasonic irradiation mainly promotes the nucleation
process.},
bdsk-url-1 = {http://www.sciencedirect.com/science/article/pii/S0041624X12002648},
bdsk-url-2 = {http://dx.doi.org/10.1016/j.ultras.2012.12.003},
doi = {http://dx.doi.org/10.1016/j.ultras.2012.12.003},
file = {Ohta2013.pdf:Ohta2013.pdf:PDF},
issn = {0041-624X},
keywords = {Piezoelectric material},
owner = {K. Agbons jr},
timestamp = {2013.09.26},
url = {http://www.sciencedirect.com/science/article/pii/S0041624X12002648}
}